Spares from: ASM, Asm Qualiflow, |
ASM | |||
02-105180D01 | Thermocouple PECVD 3 Dual | ||
03-1439 | Gasket, Silicone N2 | ||
031749 | Gasket, Graphite | ||
05000 50F5329 | Roller and Shaft Assy | ||
100112 | Valve, Manual FTM2F | ||
11-0792 | O-Ring, 72.64x3.53 Silicone | ||
11-0853 | Filter, Gas Line | ||
120117 | Valve, F RHP Quarter T | ||
120717 | Valve, F RHP Quarter T | ||
122 403 150.11 | Quartz Finger | ||
122 425 240.11 | Disc | ||
122 425 260.11 | Yoke | ||
122 425 280.11 | Pin, (Pivot) | ||
122460030 | Maintenance Panel. Manual Control Transport | ||
123 063 050 | Power Pack Assy | ||
123061240 | Assembly, Thermocouple 13 | ||
2 014 564-01 | Transformer, 220/240V i/p, o/p 6V x2, 10V x2. | ||
200 654 501 | Sensor, Finger Detector | ||
200059-01 | Manual Control Tube Loader Panel Assembly | ||
2017547-07 | Thermocouple, PECVD 1 & 2 | ||
204 1561.02 | Twisted cable ratio | ||
210112 | Valve, Qualiflow Pneumatic | ||
210117 | Valve, Pneumatic, | ||
210217 | Valve, pneumatic, F AN | ||
230 119 DD 000 | Valve, pneumatic, F HF | ||
27301001000 | Operator Panel | ||
273060070 | Keyboard (+switch) | ||
300111 | Valve, Pneumatic, F MO | ||
300112 | Valve, PECVD Pneumatic NC | ||
300117 | Valve, pneumatic, F RH | ||
300167 | Valve, Pneumatic, PSV (Qualiflow) | ||
300217 | Valve, pneumatic, | ||
300517 | Valve, Pneumatic, F RH | ||
300717 | Valve, Qualiflow Pneumatic F RH | ||
3080034 | Eurotherm 810 | ||
3082783 | Mass Flow Controller AFC-260 500sccm N2/O2 | ||
31439 | Gasket, Silicone N2 | ||
31749 | Gasket, Graphite | ||
32125036000 | Cable, assy keyboard | ||
32125066000 | Cable, assy satc/cas | ||
321492100.00 | Power Supply Cable | ||
340107460.1 | Rod, Tie boat, PECVD | ||
340107480.1 | Slide, Wheeled Boat, PECVD | ||
402-714 | Valve, PECVD Shut-Off MSV | ||
4080136 | Square Seal Silicone | ||
4080137 | Square Seal Viton | ||
445517 | Valve, Variable | ||
4764224 | Cable, ASM Y axis sensor | ||
5010011 | Power Pack Card | ||
5020044 | PCB, Control Card | ||
5150004 | PCB, Safety Card | ||
560219 | O-Ring, 170x15, (LPCVD tube bank 2) 51414 | ||
606200 | Position Detector | ||
630030440 | PCB, Signal Distribution board | ||
632 720 220 | PCB, MPU Board SATC | ||
632 720 520 | PCB, Host Adaptor | ||
632 720 520.00 | PCB, Host Adaptor | ||
632 720 530 | PCB, Communications ICC S | ||
632 720 530.00 | PCB, Communications ICC S | ||
632-720100-00 | PCB, Analog Input | ||
632-72011000 | PCB, Video Display Board | ||
63261017000 | PCB, Motor Drive | ||
63261018000 | PCB, Power Motor Drive | ||
632610190 | PCB, Finger Drive | ||
63261216000 | PCB, Z + PHI Interface | ||
63263001000 | Encoder / Operator | ||
63263012000 | Keyboard Oper. TLC PC | ||
632630170 | PCB, Interface Board Connector | ||
6326301801 | PCB, Backplane with Euro connectors | ||
63263021000 | PCB, Exerciser, TMC | ||
63263024000 | Keyboard Maint. TM PC | ||
63263025000 | PCB, S.C.L. Connector | ||
63263027000 | Sensor, PCB0 | ||
632720052 | PCB, PECVD Analog Micon IT | ||
632720081 | PCB, PECVD Memory Micon II | ||
63272009100 | PCB, Analog Output | ||
632720140.00 | Digital in/out board | ||
632720300 | PCB, RAM/ROM Assy SATC | ||
632720350 | PCB, CPU Board TMC | ||
632720360 | PCB, CPU Board 6809 TLC | ||
632720490 | PCB, MPU ICC | ||
632720500 | PCB, Memory ICC | ||
633-430-04000 | PCB, PECVD RF Control | ||
6901125 | Valve, PECVD PNEU ENOM2FF | ||
800 100 588 | Linear Drive Unit/Van Gelder Company | ||
800-810-770 | Gauge, PECVD Pressure 0-2. | ||
800-904-618 | Module, Amplifier BN 6429 | ||
800-905-295 | Fan, PECVD Heat Exch | ||
800-905-400 | Power Supply, PECVD MICON, KHSF172-4X | ||
800-905-494 | Meter, PECVD, RF, 1mA DC | ||
800-905-887 | Triac PECVD BTX94-400 (80 | ||
800.400.261 | Rail Runner | ||
800.500.294 | Encoder Strip | ||
800.500.571 | Belt, Timing | ||
800.500.572 | Belt, Timing, Bando T5-455 OL | ||
800.500.573 | Belt, Timing, Bando T5-780 OB | ||
800.500.895 | Belt, Pirelli T5-185-10 | ||
800.900.080 | Lamp Holder green | ||
800.904.262 | PCB, Preset (see photo) | ||
800.904.522 | Reflector 40x180 | ||
800.904.524 | Fork Shape Sensor | ||
800.904.619 | Overvoltage Prot BN | ||
800.904.620 | PCB, Interface BN 2 | ||
800.904.622 | PCB, Comparator BN | ||
800.904.623 | PCB, Power VA 57 / | ||
800.904.624 | PCB, Power VA 57 / | ||
800.904.626 | PCB, Preset S57 | ||
800.904.628 | PCB, Battery Backup | ||
800.904.906 | Transformer, P 282 | ||
800.904.952 | Key Switch | ||
800.905.939 | Sensor, Oil Level | ||
800500851 | Paper Roll ASM 4PP | ||
800500873 | O-Ring, 189.87x5.33, Viton, (PECVD door seal) | ||
800500944 | O-Ring, 69.44x3.53, black Silicone (PECVD) | ||
800810800 | Valve, Bellow, NW40, PECVD Vacuum | ||
800905047 | Valve, PECVD Clippard EV3M | ||
800905421 | Valve, throttle 1.27 inch, 32mm | ||
800905503 | Elbow, PECVD UHF Connector (83-1AP) | ||
800905949 | Switch, Pres ATM PECV | ||
808 007 203 | Floppy Station 3 | ||
808.008.072 | Switch, Main | ||
808.016.006 | Opto-sensor Single | ||
808.053.003 | Motor+ Gear 60 RPM Dunkermotoren # 88856 01127+88412 01470 | ||
808.053.004 | Motor, Encode gear | ||
808.053.007 | Dunkermotoren Motor Gear + Tacho | ||
808078009 | Pin, Cotter SS Boat PEC VD | ||
900638/013 | O-Ring, 170.82x6.99 Silicone VLTO Tube, brown | ||
9030030 | Controller, PS 84 0034.S from SEMY engineering POT SAPY | ||
904152-002 | Seal, Square Section 164x4 Silicone (VLTO Tube) | ||
9406191001 | Switch, Pressure | ||
994-905 236 | PCB, Video | ||
994-905 852 | PCB, Video Processor Board | ||
994.904.853 | Monitor, 15" model DF4000-340A | ||
994.904.855 | Power Supply | ||
994.904.856 | Power Supply, Xentek Inc Model 2X45-3651 | ||
AFC-260 100SCCM WF6 | Mass Flow Controller 100sccm WF6 | ||
AFC-260 1SLM N2 | Mass Flow Controller AFC-260 1SLM N2 | ||
AFC-260 1SLM N2/O2 | Mass Flow Controller AFC-260 N2/O2 1SLM | ||
AFC-260 1SLM O2 | Mass Flow Controller AFC-260 1SLM O2 | ||
AFC-260 200SCCM N2 | Mass Flow Controller 200sccm N2 | ||
AFC-260 300CC HC1 | Mass Flow controller AFC-260 300CC HC1 | ||
AFC-260 300SCCM NF3 | Mass Flow Controller 300sccm NF3 | ||
AFC-260 500SCCM HCL | Mass Flow Controller 500sccm HCL | ||
AFC-260 500SCCM N2 | Mass Flow Controller AFC-260 VCR 0.2 - 500sccm N2 | ||
AFC-260 500SCCM NH3 | Mass Flow Controller 500sccm NH3 | ||
AFC-260 500SCCM SiH4 | Mass Flow Controller AFC-260 VCR 0.2 - 500sccm SiH4 | ||
AFC-260 5SLM Ar | Mass Flow Controller model AFC-260 5SLM Ar | ||
AFC-260 5SLM N2 | Mass Flow Controller 5SLM N2 | ||
AFC-261 10L H2 | Mass Flow Controller AFC-261 10L H2 | ||
AFC-261 20 SLM Ar | Mass Flow Controller AFC-261 20SLM Ar | ||
AFC-261 20L He | Mass Flow Controller AFC-261 20L He | ||
BTW45-800R | Thyristor (SCR) BTW45-800R | ||
N0/SP/V/X | Mass Flow Controller 500SCCM HC1 | ||
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ASM QUALIFLOW | |||
13901035 | FQ M2 HF 3/8 VCR 74,5mm | ||
300617 | Valve, pneumatic, FNC M3EL RHP | ||
555911 | CHK 1 MODU.C | ||
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ASM | |||
VB 78 C8 | Valve, Qualiflow Control 1/4 | ||
VB 85 D | Valve, pneumatic, PSV (Qualiflow) | ||
VB75D | Valve, Isolation CL2 | ||
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